Magnetically-excited flexural plate wave resonator

A flexural plate wave (FPW) resonator was constructed by patterning current lines on a silicon nitride membrane suspended on a rectangular silicon frame. Eigenmodes of the rectangular membrane were excited using Lorentz forces generated between alternating surface currents and a static in-plane magnetic field. The magnetic field strength required for these devices can be achieved with small permanent magnets (≈1 cm³). Preferential coupling to a particular membrane mode was achieved by positioning current lines along longitudinal mode antinodes. An equivalent-circuit model was derived that characterizes the input impedance of a one-port device and the transmission response of a two-port device over a range of frequencies near a single membrane resonance. Experiments were performed to characterize the effects of varying magnetic field, ambient gas, gas pressure, and input power. To our knowledge, this is the first experimental demonstration of a resonant FPW device