Title :
Fabrication and characterization of a micro turbine/bearing rig
Author :
Chuang-Chia Lin ; Ghodssi, R. ; Ayon, A.A. ; Dye-Zone Chen ; Jacobson, S. ; Breuer, K. ; Epstein, A.H. ; Schmidt, M.A.
Author_Institution :
Microsyst. Technol. Lab., MIT, Cambridge, MA, USA
Abstract :
This paper reports on a process to build, package, and instrument a 5-level wafer-bonded micromachined turbine/bearing rig. The process flow involves the use of 5 wafers, 16 masks, and 9 deep silicon etching steps, as well as utilizing aligned wafer bonding, double-sided deep reactive ion etching and laser-assisted-etching. This paper also shows experimental results on flow characteristics of the hydrostatic thrust bearings and the preliminary rotational performance of the device.
Keywords :
gas turbines; laser beam etching; machine bearings; microfluidics; micromachining; rotors; semiconductor device packaging; sputter etching; turbogenerators; wafer bonding; 5-level wafer-bonded micromachined; Si; aligned wafer bonding; deep silicon etching; double-sided deep RIE; fabrication; flow characteristics; gas turbine generator; hydrostatic thrust bearings; laser-assisted-etching; micro turbine/bearing rig; microengines; packaging; process flow; rotational performance; turbine rotor; Etching; Jacobian matrices; Laboratories; Optical device fabrication; Packaging; Page description languages; Silicon; Turbines; USA Councils; Wafer bonding;
Conference_Titel :
Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-5194-0
DOI :
10.1109/MEMSYS.1999.746884
