Title :
High beam current microcolumns with large apertures
Author :
Park, S.S. ; Kim, D.W. ; Ahn, S.J. ; Kim, Y.C. ; Choi, S.K. ; Kim, D.Y. ; Kim, H.S.
Author_Institution :
Dept. of Adv. Mater. & Phys., Sunmoon Univ., Asan, South Korea
Abstract :
Advanced microcolumn results for lithography application including column designs for a high beam current, improved lens fabrication, and specimen current images are presented.
Keywords :
elemental semiconductors; microlenses; photolithography; silicon; sputter etching; 200 eV to 1 keV; Si; high beam current microcolumns; lens fabrication; lithography; specimen current images; sputter etching; Apertures; Biomembranes; Etching; Fabrication; Lenses; Lithography; Probes; Semiconductor materials; Throughput; Wires;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268608
