Scaling Inter-poly Contacts For 0.25 /spl mu/m And Below With WSI/sub x/ Polishing

Author

Perera, A. ; Lii, T. ; Iyer, Srikrishna ; Bajaj, R. ; Pfiester, J. ; Fengs, C. ; Thuy Dao ; O´Meara, D. ; Adetutu, B. ; McGuffin, K. ; Larson, R. ; BIackwell

Author_Institution

Semiconductor Technology Laboratory, 3501 Ed Bluestein Blvd., MD: K-1 O, Austin, TX 78721

fYear

1997

fDate

10-12 June 1997

Firstpage

Lastpage

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on

Print_ISBN

4-930813-75-1

Type

DOI

10.1109/VLSIT.1997.623679

Filename

623679

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