2578870

Scaling Inter-poly Contacts For 0.25 /spl mu/m And Below With WSI/sub x/ Polishing

Perera, A. ; Lii, T. ; Iyer, Srikrishna ; Bajaj, R. ; Pfiester, J. ; Fengs, C. ; Thuy Dao ; O´Meara, D. ; Adetutu, B. ; McGuffin, K. ; Larson, R. ; BIackwell

Semiconductor Technology Laboratory, 3501 Ed Bluestein Blvd., MD: K-1 O, Austin, TX 78721

1997

10-12 June 1997

29

30

English

ieee

VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on

4-930813-75-1

conf

10.1109/VLSIT.1997.623679

623679