• DocumentCode
    2578901
  • Title

    Copper Integration In Self Aligned Dual Damascene Architecture

  • Author

    Morand, Y. ; Lerme, M. ; Palleau, J. ; Torres, J. ; Vinet, F. ; Demolliens, O. ; Ulmer, L. ; Gobil, Y. ; Fayolle, M. ; Romagna, F. ; Le Bihan, R.

  • Author_Institution
    LETI ( CEA- Technologies Avancees)- CEA-G, 7 rue des martyrs, F- 38054 Grenoble Cedex 9, France
  • fYear
    1997
  • fDate
    10-12 June 1997
  • Firstpage
    31
  • Lastpage
    32
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
  • Print_ISBN
    4-930813-75-1
  • Type

    conf

  • DOI
    10.1109/VLSIT.1997.623680
  • Filename
    623680
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2578901