A robust micro conveyer realized by arrayed polyimide joint actuators

A new micro motion system (micro-conveyer) based on arrays of movable robust silicon legs has been developed and investigated. The motion is achieved by thermal actuation of polyimide joint actuators using electrical heating. Successful experiments on moving flat objects in the millimeter range with high load capacity have been performed. The conveyer consists of a 15/spl times/5 mm/sup 2/ chip with 12 silicon legs each 500 /spl mu/m long. The maximum load conveyed on the structure was 2000 mg. Conveyance velocities up to 12 mm/s have been measured. Accelerated lifetime measurements demonstrate the long-term stability of the actuators. The function of the polyimide joint actuators is unaffected after more than 2/spl times/10/sup 8/ load cycles.