DocumentCode

2578915

Title

A 5-mask CMOS Technology

Author

Onishi, H. ; Imai, K. ; Nakamura, H. ; Matsubara, Y. ; Yamada, Y. ; Tamura, T. ; Sakai, T. ; Horiuchi, T.

Author_Institution

ULSI Device Development Laboratories, NEC Corporation 1120 Shimokuzawa, Sagamihara, Kanagawa 229-11, Japan

fYear

1997

fDate

10-12 June 1997

Firstpage

33

Lastpage

34

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on

Print_ISBN

4-930813-75-1

Type

conf

DOI

10.1109/VLSIT.1997.623681

Filename

623681