A micromechanical switch as the logic elements for circuits in multi chip module on Si (MCM-Si)

Author

Hirata, A. ; Machida, K. ; Kyuragi, H. ; Maeda, M.

Author_Institution

NTT Syst. Electron. Lab., Kanagawa, Japan

fYear

1999

fDate

21-21 Jan. 1999

Firstpage

582

Lastpage

587

Abstract

An electrostatic micromechanical switch for logic elements that can conduct a single logic operation with only one switch is proposed. The actuation voltage of this switch is reduced to 15 V even though its area is 60/spl times/70 /spl mu/m/sup 2/, and this is achieved by placing narrow beams symmetrically on a multi chip module on Si (MCM-Si). The on-resistance of this switch is 5 /spl Omega/, its off-resistance is over 10/sup 10/ /spl Omega/, and its maximum switching frequency is 10 kHz This switch has two driving inputs, and its switching can be controlled by the number of driving inputs that are "High". By adjusting the beam elastic force, we made two types of switches which operate "AND" or "OR" logic at the same driving voltage. Compact logic circuits for a MCM-Si can be obtained by using these switches.

Keywords

electrostatic actuators; elemental semiconductors; logic circuits; logic gates; micromachining; multichip modules; semiconductor switches; silicon; 10/sup 10/ ohm; 15 V; 5 ohm; 60 micron; 70 micron; AND logic; MCM on Si; OR logic; Si; actuation voltage; beam elastic force; compact logic circuits; controlled switching; electrostatic micromechanical switch; equivalent circuit; fabrication; fixed driving electrode; logic elements; maximum switching frequency; movable contact electrodes; narrow beams; number of driving inputs; off-resistance; on-resistance; single logic operation; switch design; symmetrically placed beams; Circuit testing; Contacts; Electrodes; Electrostatics; Integrated circuit interconnections; Logic circuits; Micromechanical devices; Switches; Switching circuits; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on

Conference_Location

Orlando, FL, USA

ISSN

1084-6999

Print_ISBN

0-7803-5194-0

Type

conf

DOI

10.1109/MEMSYS.1999.746893

Filename

746893