Compliant electro-thermal microactuators

Author

Jonsmann, J. ; Sigmund, O. ; Bouwstra, S.

Author_Institution

Mikroelektronik Centret, Tech. Univ., Lyngby, Denmark

fYear

1999

fDate

21-21 Jan. 1999

Firstpage

588

Lastpage

593

Abstract

This paper describes design, microfabrication and characterisation of topology optimised compliant electro-thermal microactuators. The actuators are fabricated by a fast prototyping process using laser micromachining and electroplating. Actuators are characterised with respect to displacement, force and work, by use of image analysis. Four different actuators are presented. These actuators are capable of displacements of 30 /spl mu/m and forces of 15 mN. The most recent actuator designs function in reasonable accordance with design predictions.

Keywords

electroplating; laser beam machining; microactuators; micromachining; moulding; rapid prototyping (industrial); sputter etching; 2D microactuators; Joule heating; RIE; SEM image analysis; compliant electrothermal microactuators; convection model; design; displacement; electroplating; fast prototyping process; force; laser micromachining; microfabrication; silicon mold; thermal expansion; topology optimised; work; Actuators; Algorithm design and analysis; Conducting materials; Constraint optimization; Design optimization; Electrodes; Force measurement; Microactuators; Springs; Topology;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on

Conference_Location

Orlando, FL, USA

ISSN

1084-6999

Print_ISBN

0-7803-5194-0

Type

conf

DOI

10.1109/MEMSYS.1999.746894

Filename

746894