DocumentCode
2578946
Title
Thermal imprinting stepper consisting of rapid mold temperature control system
Author
Kishi, Hideki ; Yoshioka, Hiroki ; Jianguo, Yao ; Sumiyoshi, Norihiko ; Goto, Hiroshi ; Murakoshi, Y. ; Maeda, Ryutaro
Author_Institution
Device Nanotech Res. Inst. Inc., Mitsui & Co. Ltd., Tsukuba, Japan
fYear
2003
fDate
29-31 Oct. 2003
Firstpage
146
Lastpage
147
Abstract
We introduce a new step and repeat type nanoimprinting lithography (NIL) system consisting of rapid thermal control system to minimize heat cycle of nanoimprinting system. The design and experimental results are described in this paper.
Keywords
nanolithography; stepping motors; temperature control; heat cycle; nanoimprinting lithography; rapid mold temperature control system; thermal imprinting stepper; Lithography; Nanoscale devices; Position measurement; Pressure control; Rapid thermal processing; Silicon; Solid state circuits; Substrates; Temperature control; Thermal engineering;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location
Tokyo, Japan
Print_ISBN
4-89114-040-2
Type
conf
DOI
10.1109/IMNC.2003.1268618
Filename
1268618
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