Title :
Thermal imprinting stepper consisting of rapid mold temperature control system
Author :
Kishi, Hideki ; Yoshioka, Hiroki ; Jianguo, Yao ; Sumiyoshi, Norihiko ; Goto, Hiroshi ; Murakoshi, Y. ; Maeda, Ryutaro
Author_Institution :
Device Nanotech Res. Inst. Inc., Mitsui & Co. Ltd., Tsukuba, Japan
Abstract :
We introduce a new step and repeat type nanoimprinting lithography (NIL) system consisting of rapid thermal control system to minimize heat cycle of nanoimprinting system. The design and experimental results are described in this paper.
Keywords :
nanolithography; stepping motors; temperature control; heat cycle; nanoimprinting lithography; rapid mold temperature control system; thermal imprinting stepper; Lithography; Nanoscale devices; Position measurement; Pressure control; Rapid thermal processing; Silicon; Solid state circuits; Substrates; Temperature control; Thermal engineering;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268618
