Title :
Ink-jet patterning technology for microelectronics system
Author_Institution :
Technol. Platform Res. Center, Seiko Epson Corp., Nagano, Japan
Abstract :
In this paper we investigate the micro liquid process in ink-jet technology. This process includes (1) ink formation using functional materials (2) ink-jet head (3) droplet formation and its flight (4) ink-jet machine.
Keywords :
drops; ink jet printers; integrated circuits; liquid films; nozzles; vacuum deposition; droplet formation; functional materials; ink-jet machine; ink-jet patterning technology; microelectronics system; microliquid process; Electrodes; Ink; Microelectronics; Silver; Solvents; Testing;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268619