DocumentCode
2578973
Title
Application of laser scan lithography to fabrication of micro cylindrical parts
Author
Joshima, Y. ; Kokubo, T. ; Horiuchi, T.
Author_Institution
Graduate Sch. of Eng., Tokyo Denki Univ., Japan
fYear
2003
fDate
29-31 Oct. 2003
Firstpage
150
Lastpage
151
Abstract
In this paper we study about the resist films coated on fine cylindrical specimens with diameters of 160-500/spl mu/m, and the specimen being patterned lithographically by scanning a blue laser beam were etched successfully.
Keywords
laser beam etching; photoresists; 160 to 500 micron; blue laser beam; etching; laser scan lithography; microcylindrical parts; resist films; Coatings; Etching; Fasteners; Laser applications; Laser beams; Lithography; Optical device fabrication; Resists; Spline; Steel;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location
Tokyo, Japan
Print_ISBN
4-89114-040-2
Type
conf
DOI
10.1109/IMNC.2003.1268620
Filename
1268620
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