Title :
Application of laser scan lithography to fabrication of micro cylindrical parts
Author :
Joshima, Y. ; Kokubo, T. ; Horiuchi, T.
Author_Institution :
Graduate Sch. of Eng., Tokyo Denki Univ., Japan
Abstract :
In this paper we study about the resist films coated on fine cylindrical specimens with diameters of 160-500/spl mu/m, and the specimen being patterned lithographically by scanning a blue laser beam were etched successfully.
Keywords :
laser beam etching; photoresists; 160 to 500 micron; blue laser beam; etching; laser scan lithography; microcylindrical parts; resist films; Coatings; Etching; Fasteners; Laser applications; Laser beams; Lithography; Optical device fabrication; Resists; Spline; Steel;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268620
