Title :
Fabrication of mold master for spiral micro-coil utilizing X-ray lithography of synchrotron radiation
Author :
Mekaru, H. ; Kusumi, S. ; Sato, N. ; Yamashita, M. ; Shimada, O. ; Hattori, T.
Author_Institution :
Lab. of Adv. Sci. & Technol for Ind., Himeji Inst. of Technol., Hyogo, Japan
Abstract :
In this paper, the technique of producing a resist master for a metallic mold of a 3D-micro-coil fabricated by 3D X-ray lithography is reported.
Keywords :
X-ray lithography; coils; moulding; resists; 3D X-ray lithography; 3D microcoil; metallic mold; mold master; resist master; spiral microcoil; synchrotron radiation; Coils; Engine cylinders; Fabrication; Laboratories; Personal digital assistants; Resists; Spirals; Synchrotron radiation; Wire; X-ray lithography;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268623
