Title :
Development of electron beam recorder with a /spl theta/-stage
Author :
Kojima, Y. ; Sato, M. ; Kasono, O. ; Katsumura, M. ; Iida, T.
Author_Institution :
Corporate Res. & Dev. Labs., Pioneer Corp., Saitama, Japan
Abstract :
In this paper, outline of EBR and the results of circle patterning were reported. Electron beam recorder with the /spl theta/-stage had a promising ability for high accuracy recording.
Keywords :
electron beam applications; optical disc storage; recorders; /spl theta/-stage; circle pattern; electron beam recorder; ultra high-density recording; Acceleration; Convergence; Disk recording; Electron beams; Extraterrestrial measurements; Focusing; Lenses; Optical control; Particle beams; Structural beams;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268627
