Stability and applications of high-temperature piezoelectric crystals

Author

Fritze, H. ; Schulz, Markus ; Richter, D.

Author_Institution

Clausthal Univ. of Technol., Goslar, Germany

fYear

2014

fDate

26-30 May 2014

Firstpage

219

Lastpage

220

Abstract

High-temperature piezoelectric crystals such as gallium phosphate (GaPO₄) and langasite (La₃Ga₅SiO₁₄) have been demonstrated to show piezoelectric properties at fairly high temperatures. For example, langasite can be exited piezoelectrically up to temperatures close to its melting point at about 1470 °C. The resonance behavior including damping and temperature dependent frequency of resonators made of these crystals are investigated and reviewed to evaluate the applicability of such devices as high-temperature gas sensors or film deposition monitors.

Keywords

gallium compounds; gas sensors; high-temperature effects; lanthanum compounds; melting point; piezoelectricity; thin film devices; GaPO₄; La₃Ga₅SiO₁₄; damping; film deposition monitoring; gallium phosphate; high-temperature gas sensors; high-temperature piezoelectric crystals; langasite; melting point; piezoelectric properties; piezoelectrically; resonance behavior; Chemical sensors; III-V semiconductor materials; Resonant frequency; Sensor systems; Temperature sensors; high-temperature; langasite; piezoelectric crystals; resonant sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Oxide Materials for Electronic Engineering (OMEE), 2014 IEEE International Conference on

Conference_Location

Lviv

Print_ISBN

978-1-4799-5960-0

Type

conf

DOI

10.1109/OMEE.2014.6912420

Filename

6912420