Title :
Stability and applications of high-temperature piezoelectric crystals
Author :
Fritze, H. ; Schulz, Markus ; Richter, D.
Author_Institution :
Clausthal Univ. of Technol., Goslar, Germany
Abstract :
High-temperature piezoelectric crystals such as gallium phosphate (GaPO4) and langasite (La3Ga5SiO14) have been demonstrated to show piezoelectric properties at fairly high temperatures. For example, langasite can be exited piezoelectrically up to temperatures close to its melting point at about 1470 °C. The resonance behavior including damping and temperature dependent frequency of resonators made of these crystals are investigated and reviewed to evaluate the applicability of such devices as high-temperature gas sensors or film deposition monitors.
Keywords :
gallium compounds; gas sensors; high-temperature effects; lanthanum compounds; melting point; piezoelectricity; thin film devices; GaPO4; La3Ga5SiO14; damping; film deposition monitoring; gallium phosphate; high-temperature gas sensors; high-temperature piezoelectric crystals; langasite; melting point; piezoelectric properties; piezoelectrically; resonance behavior; Chemical sensors; III-V semiconductor materials; Resonant frequency; Sensor systems; Temperature sensors; high-temperature; langasite; piezoelectric crystals; resonant sensors;
Conference_Titel :
Oxide Materials for Electronic Engineering (OMEE), 2014 IEEE International Conference on
Conference_Location :
Lviv
Print_ISBN :
978-1-4799-5960-0
DOI :
10.1109/OMEE.2014.6912420
