• DocumentCode
    2579212
  • Title

    Bi-directional movable latched micromechanism using one-directional movable Chevron electrothermal actuators for switch and relay applications

  • Author

    Wen-Chih Chen ; Chia-Yu Wu ; Chengkuo Lee

  • Author_Institution
    Asia Pacific Microsystems Inc., Hsinchu, Taiwan
  • fYear
    2003
  • fDate
    29-31 Oct. 2003
  • Firstpage
    180
  • Lastpage
    181
  • Abstract
    In this paper, we present a creative bi-directional movable latched micromechanism for switch and relay application. Bistable microelectromechanical (MEM) mechanisms provide two relative positions that are both mechanically stable. Preliminary results prove this new design is promising in optical switch application.
  • Keywords
    microactuators; microrelays; microswitches; MEMS; bidirectional movable latched micromechanism; one-directional movable Chevron electrothermal actuators; optical switch applications; relays; Asia; Bidirectional control; Electrostatic actuators; Electrothermal effects; Mirrors; Optical bistability; Optical switches; Relays; Research and development; Springs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
  • Conference_Location
    Tokyo, Japan
  • Print_ISBN
    4-89114-040-2
  • Type

    conf

  • DOI
    10.1109/IMNC.2003.1268634
  • Filename
    1268634
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2579212