DocumentCode
2579276
Title
Increased emission efficiency of gated cold cathode with carbonic nano-pillars
Author
Yoshida, Tomoya ; Baba, Akiyoshi ; Asano, Tanemasa
Author_Institution
Center for Microelectron. Syst., Kyushu Inst. of Technol., Fukuoka, Japan
fYear
2003
fDate
29-31 Oct. 2003
Firstpage
188
Lastpage
189
Abstract
In this paper, we show that the adhesivity of the carbonic film to the substrate is very much improved by modifying the surface of the carbonic film with ion beam irradiation and the deformation of the gate electrode can be minimized. As a result, highly efficient electron-emission characteristic of the gated cold cathode with nano-pillars was demonstrated.
Keywords
adhesion; carbon; cathodes; electron field emission; ion beam effects; nanostructured materials; phosphors; photoluminescence; plasma CVD; sputter etching; thin films; C; adhesivity; carbonic nanopillars; emission efficiency; gate electrode; gated cold cathode; ion beam irradiation; Apertures; Argon; Cathodes; Hafnium; Ion beams; Organic materials; Plasma applications; Plasma displays; Resists; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location
Tokyo, Japan
Print_ISBN
4-89114-040-2
Type
conf
DOI
10.1109/IMNC.2003.1268638
Filename
1268638
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