Title :
Modeling And Characterization Of Si/SiO/sub 2/ Interface Roughness
Author :
Heng-Chih Lin ; Kan, E.C. ; Yamanaka, T. ; Helms, C.R.
Author_Institution :
Department of Electrical Engineering, Stanford University, Stanford, CA94305, USA
Conference_Titel :
VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
Print_ISBN :
4-930813-75-1
DOI :
10.1109/VLSIT.1997.623686
