Title :
High-power-density MHz-switching monolithic DC-DC converter with thin-film inductor
Author :
Katayama, Yasushi ; Sugahara, Satoshi ; Nakazawa, Haruo ; Edo, Masaharu
Author_Institution :
Fuji Electr. Corp. Res. & Dev. Ltd., Tokyo, Japan
Abstract :
In this paper, we report the newly developed DC-DC converter IC termed monolithic DC-DC converter, in which a thin-film inductor and power IC are integrated, and describe the micro DC-DC converter module utilizing this IC. The thin-film inductor used in the monolithic DC-DC converter was fabricated by RF sputtering, photosensitive polyimide lithography and electro-plating onto the power IC. The micro DC-DC converter module using the monolithic DC-DC converter achieved power density of 5.6 W/cm3 at output power of 1 W and maximum efficiency of 83.3% at switching frequency of 3 MHz
Keywords :
DC-DC power convertors; PWM power convertors; electroplating; inductors; lithography; monolithic integrated circuits; power integrated circuits; sputtering; thin film devices; 1 W; 3 MHz; 83.3 percent; RF sputtering; electro-plating; high-power-density MHz-switching; micro DC-DC converter module; monolithic DC-DC converter; photosensitive polyimide lithography; power IC; power density; switching frequency; thin-film inductor; DC-DC power converters; Lithography; Monolithic integrated circuits; Polyimides; Power integrated circuits; Radio frequency; Radiofrequency integrated circuits; Sputtering; Switching converters; Thin film inductors;
Conference_Titel :
Power Electronics Specialists Conference, 2000. PESC 00. 2000 IEEE 31st Annual
Conference_Location :
Galway
Print_ISBN :
0-7803-5692-6
DOI :
10.1109/PESC.2000.880526
