Title :
Fabrication of 3-D microreactor structures embedded in photosensitive glass by femtosecond laser
Author :
Masuda, Masashi ; Sugioka, Koji ; Cheng, Ya ; Hongo, Tomohiro ; Shihoyama, Kazuhiko ; Takai, Hiroshi ; Miyamoto, Iwao ; Midorikawa, Katsumi
Author_Institution :
Inst. of Phys. & Chem. Res., RIKEN, Saitama, Japan
Abstract :
We have fabricated 3-D microreactor structures embedded in photosensitive glass by femtosecond laser direct writing followed by heat treatment and chemical etching in HF solution. The etching condition has been optimized for getting higher resolution. This technique was applied for manufacturing microfluidic structures containing microvalves which controlled the direction of reagent flow. This technique would be very attractive for rapid prototyping of micro-total-analysis systems.
Keywords :
etching; glass; heat treatment; laser materials processing; microfluidics; microvalves; 3D microreactor structures; chemical etching; femtosecond laser; heat treatment; manufacturing microfluidic structures; micro-total-analysis systems; microstructure; microvalves; photosensitive glass; rapid prototyping; reagent flow; Chemical lasers; Etching; Glass; Hafnium; Heat treatment; Manufacturing; Microfluidics; Microvalves; Optical device fabrication; Writing;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268706
