Title :
A Simple Sub-0.3/spl mu/m CMOS Technology With Five-level Interconnect Using Al-plug And HSQ Of Low-k For High Performance Processor
Author :
Yoshiyama, K. ; Okada, K. ; Igarashi, M. ; Yamada, K. ; Shimizu, S. ; Takata, Y. ; Osaki, A. ; Higashitani, K. ; Asai, S.
Author_Institution :
ULSI Laboratory, Mitsubishi Electric Corporation 4-1 Mizuhara, Itami, Hyogo 664, JAPAN
Conference_Titel :
VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
Print_ISBN :
4-930813-75-1
DOI :
10.1109/VLSIT.1997.623692
