Title :
Ablation of organic polymers by direct exposure to radiation from a laser plamsa X-ray source
Author :
Fiedorowicz, H. ; Bartnik, A. ; Juha, L. ; Krasa, J. ; Kubat, P. ; Mikolajczyk, J. ; Rakowski, R.
Author_Institution :
Inst. of Optoelectron., Mil. Univ. of Technol., Warszawa, Poland
Abstract :
Summary form only given. In this paper, we present the first experiments on direct photo-etching of organic polymers using a laser plasma x-ray source based on a laser-irradiated gas puff target.
Keywords :
laser ablation; laser beam etching; plasma X-ray sources; polymers; ablation; laser plasma X-ray source; laser-irradiation; organic polymers; photo-etching; Free electron lasers; Gas lasers; Laser ablation; Laser theory; Micromachining; Plasma measurements; Plasma sources; Plasma x-ray sources; Polymers; X-ray lasers;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268748
