A Novel CMOS Compatible Stacked Floating Gate Device Using TiN As A Control Gate

Author

O´Connor ; Mansfield, W.M. ; Bude, J.D. ; Cerullo, M. ; Klemens, F. ; Kornblit, A. ; Mastrapasqua, M. ; Weber, G.R. ; Woon Wal Tal

Author_Institution

Bell Laboratories, Lucent Technologies Murray Hill NJ 07974

fYear

1997

fDate

10-12 June 1997

Firstpage

Lastpage

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on

Print_ISBN

4-930813-75-1

Type

DOI

10.1109/VLSIT.1997.623695

Filename

623695

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