DocumentCode
2581169
Title
Millions of cantilevers and atomic force microscopy up to 100 MHz
Author
Kawakatsu, H.
Author_Institution
Inst. of Ind. Sci., Tokyo Univ., Japan
fYear
2003
fDate
29-31 Oct. 2003
Firstpage
282
Lastpage
283
Abstract
In this paper, gives an overview on a currently running project entitled "Atomic Force Microscopy up to 1GHz". The project is addressed in the following three issues; (i) nanocantilever fabrication, (ii) cantilever detection and excitation, and (iii) circuitry.
Keywords
atomic force microscopy; elemental semiconductors; light interferometers; silicon; 100 MHz; Si; atomic force microscopy; cantilever detection; cantilever excitation; light interferometers; nanocantilever fabrication; Atomic force microscopy; Diode lasers; Face detection; Frequency; Laser excitation; Optical filters; Optical imaging; Optical interferometry; Optical mixing; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location
Tokyo, Japan
Print_ISBN
4-89114-040-2
Type
conf
DOI
10.1109/IMNC.2003.1268756
Filename
1268756
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