Title :
Characteristics of nano-electrostatic actuator fabricated by FIB-CVD
Author :
Kometani, Reo ; Morita, Takahito ; Watanabe, Keiichiro ; Hoshino, Takayuki ; Kondo, Kazushige ; Kanda, Kazuhiro ; Haruyama, Yuichi ; Kaito, Takashi ; Fujita, Jun-ichi ; Ishida, Masahiko ; Ochiai, Yukinori ; Matsui, Shinji
Author_Institution :
LASTI, Himeji Inst. of Technol., Hyogo, Japan
Abstract :
We have developed a nano-manipulator that can perform inclusion of nano parts and cell operation and an actuator that can be used by the micro- and nano-system by FIB-CVD.
Keywords :
CVD coatings; electrostatic actuators; manipulators; nanopositioning; FIB-CVD; manipulator; nanoelectrostatic actuator; structural characteristics; Actuators; Biomedical optical imaging; Electrostatics; Fabrication; Glass; Instruments; National electric code; Optical microscopy; Plastics; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268757
