DocumentCode
2581195
Title
Fabrication of corrugated curved beam type electrostatic actuator and SDA driven self-assembling mechanism for VOA applications
Author
Yen-Jyh Lai ; Chengkuo Lee ; Chia-Yu Wu ; Yu-Shen Lin ; Ming Hung Tasi ; Ruey-Shing Huang ; Min-Shyong Lin
Author_Institution
Asia Pacific Microsyst. Inc., Hsinchu, Taiwan
fYear
2003
fDate
29-31 Oct. 2003
Firstpage
286
Lastpage
287
Abstract
In this paper, we present an innovative design of corrugated curved beam type electrostatic actuator with continuous motion capability, and SDA (scratch drive actuator) driven self-assembling mechanism for axial type MEMS VOA application.
Keywords
electrostatic actuators; optical attenuators; self-assembly; MEMS variable optical attenuator; corrugated curved beam type electrostatic actuator; scratch drive actuator driven self-assembling mechanism; Assembly; Attenuation; Electrodes; Electrostatic actuators; Fabrication; Insertion loss; Micromechanical devices; Optical fiber devices; Residual stresses; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location
Tokyo, Japan
Print_ISBN
4-89114-040-2
Type
conf
DOI
10.1109/IMNC.2003.1268758
Filename
1268758
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