Title :
A 90 GHz liquid sensing substrate integrated cavity resonator in LTCC for microfluidic sensing applications
Author :
Liu, S. ; Ocket, I. ; Schreurs, D. ; De Raedt, W. ; Nauwelaers, B.
Author_Institution :
Div. ESAT-TELEMIC, Univ. of Leuven, Leuven, Belgium
Abstract :
This paper presents a reflection-type 90 GHz substrate integrated cavity resonator sensor realized in LTCC technology for lab-on-chip microfluidic applications. A linear relationship between the resonance frequency of the sensor and the permittivity of the material under test was observed from measurements on low-loss materials. Calibration curves are also obtained for water-isopropanol mixtures which show monotonic behaviours with respect to the isopropanol concentrations. Measurements of the sensor thus demonstrate that it is promising for lab-on-chip microfluidic sensing applications.
Keywords :
cavity resonators; liquids; microfluidics; microsensors; permittivity; substrates; LTCC; calibration curves; frequency 90 GHz; isopropanol concentrations; lab-on-chip microfluidic applications; linear relationship; liquid sensing substrate integrated cavity resonator; low-loss materials; microfluidic sensing applications; monotonic behaviours; permittivity; resonance frequency; water-isopropanol mixtures; Cavity resonators; Liquids; Microwave theory and techniques; Sensors; Substrates; Transmission line measurements; cavity resonator; microfluidics; microwave sensors; millimeter wave circuits;
Conference_Titel :
RF and Wireless Technologies for Biomedical and Healthcare Applications (IMWS-Bio), 2014 IEEE MTT-S International Microwave Workshop Series on
Conference_Location :
London
Print_ISBN :
978-1-4799-5445-2
DOI :
10.1109/IMWS-BIO.2014.7032390
