DocumentCode :
2582613
Title :
Temperature-compensated SH-APM sensors: new theoretical and experimental results
Author :
Déjous, C. ; Esteban, I. ; Rebière, D. ; Pistré, J. ; Planade, R.
Author_Institution :
Bordeaux I Univ., Talence, France
fYear :
1997
fDate :
28-30 May 1997
Firstpage :
163
Lastpage :
168
Abstract :
Our aim is to study acoustic wave devices for sensing applications in gas or liquid media. Compared to surface acoustic wave (SAW) devices, shear horizontal acoustic plate mode (SH-APM) devices are based on thin piezoelectric plates, so that a great number of stationary waves, or plate modes, can propagate. SH-APM devices present two main advantages. Firstly, they are able to work in a liquid medium without excessive acoustic loss. Secondly, they can work in an aggressive medium, by using the unmetallized quartz surface for detection. As temperature variation is a critical parameter, it is important to know the device behaviour with temperature. This was already achieved for SAW devices, and it has been done partially for SH-APM devices. In this paper, we propose to recall main theoretical results, and to use the model approach to study particular SH-APM devices, from a theoretical and an experimental point of view
Keywords :
chemical sensors; crystal oscillators; piezoelectric transducers; SH-APM sensors; aggressive medium; plate modes; shear horizontal acoustic plate mode (SH-APM) devices; stationary waves; temperature variation; thin piezoelectric plates; unmetallized quartz surface; Acoustic devices; Acoustic propagation; Acoustic transducers; Acoustic waves; Chemical sensors; Piezoelectric transducers; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Frequency Control Symposium, 1997., Proceedings of the 1997 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-3728-X
Type :
conf
DOI :
10.1109/FREQ.1997.638538
Filename :
638538
Link To Document :
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