Title :
0.6 /spl mu/m Pitlch Highly Reliable Multilevel Interconnection Using Hydrogen Silicate Based Inorganic SOG For Sub-quarter Micron CMOS Technology
Author :
Oda, N. ; Usami, T. ; Kishimoto, K. ; Matsumoto, A. ; Mikagi, K. ; Kikuta, K. ; Gomi, H. ; Sakai, I.
Author_Institution :
ULSI Device Development Laboratories, NEC Corporation 1120, Shimokuzawa, Sa,gamihara, Kanagawa 229, Japan
Conference_Titel :
VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
Print_ISBN :
4-930813-75-1
DOI :
10.1109/VLSIT.1997.623704
