Title :
A Novel Technique For 3-d Integration: Ge-seeded Laterally Crystallized TFTs
Author :
Subramanian, V. ; Saraswat, K.C.
Author_Institution :
Electrical Engineering Department Stanford University Stanford, CA 94305, USA
Conference_Titel :
VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
Print_ISBN :
4-930813-75-1
DOI :
10.1109/VLSIT.1997.623713