Title :
Optimizing the Dynamic Response of RF MEMS Switches using Tailored Voltage Pulses
Author :
Leus, Vitaly ; Hirshberg, Arnon ; Elata, David
Author_Institution :
Technion - Israel Inst. of Technol., Haifa
Abstract :
This paper presents analytic modeling, simulations, and experimental validation of RF MEMS switch actuation using tailored voltage waveforms. This actuation scheme can eliminate impact bouncing during switch activation and can significantly reduce harmonic oscillations during switch release.
Keywords :
microswitches; RF MEMS switches; actuation; harmonic oscillations; impact bouncing; tailored voltage pulses; Actuators; Aerodynamics; Communication switching; Delay; Dielectrics; Electrodes; Electrostatics; Radiofrequency microelectromechanical systems; Switches; Voltage;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems, 2007. EuroSime 2007. International Conference on
Conference_Location :
London
Print_ISBN :
1-4244-1105-X
Electronic_ISBN :
1-4244-1106-8
DOI :
10.1109/ESIME.2007.359967
