Title :
Magnetically actuated microvalve for disposable drug infusor
Author :
Duch, M. ; Casals-Terré, J. ; Plaza, J.A. ; Esteve, J. ; Pérez-Castillejos, R. ; Vallés, E. ; Gómez, E.
Author_Institution :
Centra Nac. Microelectron., Barcelona
Abstract :
A magnetic microfluidic valve has been analyzed to improve its performance. Operation relies on the use of a permanent magnet which interacts with an electrodeposited layer of Co-Ni on a V-shaped cantilever beam. The deflection caused by the magnetic forces opens or closes the fluid flow. The microvalve performance has been optimized by means of finite element analysis. The FEA model has been experimentally validated using confocal microscopy and used to improve the magnetic circuit. Then, a fluidic cell has been built and the microvalve has been demonstrated to work as a flow regulator, when being magnetically actuated, and as a check valve. Experiments showed that the fabricated prototypes presented a good performance from 0 to 50 mbar, with control on a flow up to 18 seem.
Keywords :
bioMEMS; cobalt; drug delivery systems; finite element analysis; microactuators; microfluidics; microvalves; nickel; optical microscopy; Co-Ni; V-shaped cantilever beam; confocal microscopy; disposable drug infusor; electrodeposited layer; finite element analysis; flow regulator; fluid flow; fluidic cell; magnetic circuit; magnetic forces; magnetic microfluidic valve; magnetically actuated microvalve; Drugs; Fluid flow; Magnetic analysis; Magnetic forces; Micromagnetics; Microvalves; Performance analysis; Permanent magnets; Structural beams; Valves; Microvalve; drug infusor; flow regulator; magnetic actuation;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems, 2007. EuroSime 2007. International Conference on
Conference_Location :
London
Print_ISBN :
1-4244-1105-X
Electronic_ISBN :
1-4244-1106-8
DOI :
10.1109/ESIME.2007.360028
