Title :
Circuital Modelling of Shunt Capacitive RF MEMS Switches
Author :
Bartolucci, Giancarlo ; Marcelli, Romolo ; Catoni, Simone ; Margesin, Benno ; Giacomozzi, Flavio ; Lucibello, Andrea ; Mulloni, Viviana ; Farinelli, Paola
Author_Institution :
Dept. of Electron. Eng., Univ. of Roma Tor Vergata, Rome
Abstract :
A novel circuital model for a shunt connected RF MEMS coplanar switch, based on a fully analytical approach, is presented. The numerical simulations performed with the proposed new model are in good agreement with experimental measurements.
Keywords :
capacitors; microswitches; microwave switches; circuital modelling; numerical simulations; shunt capacitive RF MEMS switches; Bridge circuits; Conductors; Equivalent circuits; Integrated circuit modeling; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Shunt (electrical); Switches; Switching circuits;
Conference_Titel :
Microwave Integrated Circuit Conference, 2008. EuMIC 2008. European
Conference_Location :
Amsterdam
Print_ISBN :
978-2-87487-007-1
DOI :
10.1109/EMICC.2008.4772304
