Title :
Alumina and LTCC Technology for RF MEMS Switches and True Time Delay Lines
Author :
Buttiglione, Roberta ; Catoni, Simone ; De Angelis, Giorgio ; Dispenza, Massimiliano ; Fiorello, Annamaria ; Kautio, Kari ; Ladhes, Manu ; Marcelli, Romolo ; Ronka, Kari
Author_Institution :
SELEX-SI, Roma
Abstract :
The technology for the realization of RF MEMS ohmic series switches on LTCC substrates has been set up for their implementation in true time delay line configurations. Alumina and LTCC structures for validating the technological process on the individual switches have been obtained and characterized. Static delay lines on LTCC have been manufactured and tested to get the expected electrical performances for the final configuration.
Keywords :
alumina; ceramics; delay lines; microswitches; Al2O3; LTCC substrates; RF MEMS switches; alumina; static delay lines; true time delay line; Biomembranes; Delay effects; Etching; Ferroelectric materials; Gold; Lithography; Performance evaluation; Radiofrequency microelectromechanical systems; Switches; Thermal conductivity;
Conference_Titel :
Microwave Integrated Circuit Conference, 2008. EuMIC 2008. European
Conference_Location :
Amsterdam
Print_ISBN :
978-2-87487-007-1
DOI :
10.1109/EMICC.2008.4772305
