Title :
1989 IEEE SOS/SOI Technology Conference (Cat. No.89CH2796-1)
Abstract :
The following topics are dealt with: device modeling and physics; device characterization, materials fabrication, device processing, materials characterization, advanced circuit applications
Keywords :
integrated circuit technology; semiconductor device models; semiconductor technology; semiconductor-insulator boundaries; SOI technology; SOS technology; advanced circuit applications; device characterization; device modeling; device physics; device processing; materials characterization; materials fabrication;
Conference_Titel :
SOS/SOI Technology Conference, 1989., 1989 IEEE
Conference_Location :
Stateline, NV, USA
DOI :
10.1109/SOI.1989.69741
