Impact Of Trench Sidewall Interface Trap In Shallow Trench Isolation On Junction Leakage Current Characteristics For Sub-0.25 /spl mu/m CMOS Devices

Author

Inaba, S. ; Takahashi, M. ; Okayama, Y. ; Yagishita, A. ; Matsuoka, F. ; Ishiuchi, H.

fYear

1997

fDate

10-12 June 1997

Firstpage

119

Lastpage

120

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on

Print_ISBN

4-930813-75-1

Type

DOI

10.1109/VLSIT.1997.623727

Filename

623727

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