Title :
Phase Shifter Design Based on Fast RF MEMS Switched Capacitors
Author :
Lacroix, Benjamin ; Pothier, Arnaud ; Crunteanu, Aurelian ; Blondy, Pierre
Author_Institution :
CNRS, Univ. de Limoges, Limoges
Abstract :
This paper presents the design and fabrication of fast DMTL RF MEMS phase shifters. Distributed MEMS Transmission Lines are being used with miniature RF MEMS switched capacitors (40times40 mum2), actuating at 25 V with a switching time around 1 mus. Both 90 and 180 degree phase shifters presented here operate at 20 GHz, are respectively less than 4.5 mm and 8.5 mm long. They are designed with 6 and 12 unit cells to achieve the desired phase shift. Measured return loss is respectively better than -13 dB and -11 dB for the 90 and the 180 degree phase shifters, and insertion loss is respectively less than 0.8 dB and 1.8 dB at 20 GHz.
Keywords :
capacitors; high-frequency transmission lines; micromechanical devices; microwave phase shifters; distributed MEMS transmission lines; fast RF MEMS; frequency 20 GHz; insertion loss; phase shifter design; return loss; switched capacitors; voltage 25 V; Bridge circuits; Capacitors; Coplanar waveguides; Fabrication; Micromechanical devices; Phase shifters; Radiofrequency microelectromechanical systems; Residual stresses; Springs; Time measurement;
Conference_Titel :
Microwave Integrated Circuit Conference, 2008. EuMIC 2008. European
Conference_Location :
Amsterdam
Print_ISBN :
978-2-87487-007-1
DOI :
10.1109/EMICC.2008.4772333