Title :
Fabrication Of 100 nm pMOSFETS With Hybrid AFW / STM Lithography
Author :
Sob ; Wilder, K. ; Atalar, A. ; Quate, C.F.
Author_Institution :
E. L. Ginzton Laboratory, Stanford University, Stanford, CA 94305-4085, U.S.A.
Conference_Titel :
VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
Print_ISBN :
4-930813-75-1
DOI :
10.1109/VLSIT.1997.623732
