DocumentCode
2589004
Title
Physical-chemical foundations of piezo-acoustic sensing mechanisms
Author
Johannsmann, Diethelm
fYear
2009
fDate
20-24 April 2009
Abstract
Piezoelectric resonators are in use as mass-sensing devices for almost half a century. More recently it was recognized that shifts in frequency and bandwidth can come about by a diverse variety of interactions with the sample. The classical “load” consists of a thin film, which shifts the resonance frequency due to its inertia. Other types of loading include semi-infinite viscoelastic media, rough objects contacting the crystal via isolated asperities, mechanically nonlinear contacts, and dielectric films. These interactions are now rather well understood and will be presented in a unified framework.
Keywords
Bandwidth; Dielectric films; Dielectric thin films; Elasticity; Frequency diversity; Piezoelectric devices; Piezoelectric films; Resonance; Resonant frequency; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 2009 Joint with the 22nd European Frequency and Time forum. IEEE International
Conference_Location
Besancon, France
ISSN
1075-6787
Print_ISBN
978-1-4244-3511-1
Electronic_ISBN
1075-6787
Type
conf
DOI
10.1109/FREQ.2009.5168119
Filename
5168119
Link To Document