Title :
Modeling And Characterization Of N/sup +/- And P/sup +/-polysilicon-gated Ultra Thin Oxides (21-26 /spl Aring/)
Author :
Lo, S.-H. ; Buchanan, D.A. ; Taur, Y. ; Han, L.-K. ; Wu, E.
Author_Institution :
IBM T. J. Watson Research Center, Yorktown Heights, NY 21BM SRDC, Hopewell Junction, NY
Conference_Titel :
VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
Print_ISBN :
4-930813-75-1
DOI :
10.1109/VLSIT.1997.623742
