Title :
Cylindrical Full Metal Capacitor Technology For High-speed Gigabit DRAMs
Author :
Drynan, J.M. ; Nakajima, K. ; Akimoto, T. ; Saito, K. ; Suzuki, M. ; Kamiyarna ; Takaishi, Y.
Author_Institution :
ULSI Device Development Labs, NEC Corp., Sagamihara, Kanagawa Japan
Conference_Titel :
VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
Print_ISBN :
4-930813-75-1
DOI :
10.1109/VLSIT.1997.623743
