Cylindrical Full Metal Capacitor Technology For High-speed Gigabit DRAMs

Author

Drynan, J.M. ; Nakajima, K. ; Akimoto, T. ; Saito, K. ; Suzuki, M. ; Kamiyarna ; Takaishi, Y.

Author_Institution

ULSI Device Development Labs, NEC Corp., Sagamihara, Kanagawa Japan

fYear

1997

fDate

10-12 June 1997

Firstpage

151

Lastpage

152

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on

Print_ISBN

4-930813-75-1

Type

DOI

10.1109/VLSIT.1997.623743

Filename

623743

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