Title :
The Simplest Stacked BST Capacitor For The Future DRAMs Using A Novel Low Temperature Growth Enhanced Crystallization
Author :
Takehiro, S. ; Yamauchi, S. ; Yoshimaru, M. ; Onoda, H.
Author_Institution :
VLSI R&D Center, Oki Electric Industry Co., Ltd. Hachioji, Tokyo 193 Japan
Conference_Titel :
VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
Print_ISBN :
4-930813-75-1
DOI :
10.1109/VLSIT.1997.623744
