A resonant electrostatic induction motor with piezoelectric elements as inductors connected to its slider electrodes

This paper proposes an application of piezoelectric elements as inductors for a resonant electrostatic induction motor. The stator and the slider of the motor are made of plastic films with fine pitched electrodes patterned onto them. The stator electrodes are connected to the three-phase voltage source, whereas the slider electrodes are connected to three piezoelectric elements. At resonant condition, the slider voltage is boosted and maximum thrust force is obtained. A working prototype was constructed and driven with a three-phase excitation voltage of 513 V_0-p/13.86 kHz, and traveled at its steady speed of approximately 60 mm/s, in balance with the friction between the films.