The influence of electrode´s stratified structures on SAW devices microwave characteristics

The thickness and elastic properties of electrodes´ aluminum film as well as behavior nanometer adhesion sublayer influence on characteristics of SAW devices in microwave band. Influence adhesion sublayer thickness to thermostability resonance frequency of IDT on ST-cuts quartz at the 2 GHz and also reflection coefficient SAW from electrodes´ edges IDT is investigated. Determine value layer thickness of aluminum and also values adhesion sublayer thickness of chrome and vanadium into two-layer electrodes at which the reflection coefficient is equal to the zero. In paper is shown substantial influence adhesion sublayer on frequency description amplitude-frequency characteristic of SAW filter. Into the there are some crystallography directions in the crystal LiNbO₃ found strong frequency dependence angle between group and phase velocities. Some crystallography crystal cuts and directions in the crystal LiNbO₃ with layer structure Ltmetal film-piezocrystalGt on the surface are found at which exists strong frequency dependence of angle between group and phase velocities.