Title :
Theoretical analysis of SAW propagation characteristics in (100) oriented AlN/diamond structure
Author :
Sung, Chia-Chi ; Chiang, Yuan-Feng ; Ro, Ruyen ; Lee, Ruyue ; Wu, Sean
Author_Institution :
Dept. of Eng. Sci. & Ocean Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
The surface acoustic waves (SAWs) propagating in interdigital transducer (IDT)/(100) aluminum nitride (AlN)/diamond possess the greater phase velocity and coupling coefficient than those in IDT/(002) AlN/diamond. In this study, the finite element method (FEM) is employed to calculate SAW characteristics in these two layered structures with different electric interfaces; i.e., IDT/AlN/diamond, AlN/IDT/diamond, IDT/AlN/thin metal film/diamond, and thin metal film /AlN/IDT/diamond. The effects of Cu and Al electrodes on SAW characteristics are illustrated. Simulation results show that the Cu IDT/(100) AlN/diamond structure can support a SAW with a coupling coefficient of 1.71%, a phase velocity of 9705 m/s, and a reflectivity of 0.15, which is applicable for the miniaturized wideband and super high band applications.
Keywords :
III-V semiconductors; aluminium compounds; diamond; elemental semiconductors; finite element analysis; surface acoustic wave transducers; wide band gap semiconductors; AlN-C; Cu; aluminum nitride; diamond; finite element method; interdigital transducer; surface acoustic waves propagation characteristics; Acoustic transducers; Acoustic waves; Aluminum nitride; Electrodes; Finite element methods; Reflectivity; Sea surface; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide; AlN; diamond; finite element method; reflectivity; surface acoustic wave;
Conference_Titel :
Frequency Control Symposium, 2009 Joint with the 22nd European Frequency and Time forum. IEEE International
Conference_Location :
Besancon
Print_ISBN :
978-1-4244-3511-1
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2009.5168219
