Title :
Wafer scale biomolecule grafting: the first step for low cost, high throughput active biochip manufacturing
Author :
Caillat, P. ; Cuzin, M. ; Hofmeister, A.
Author_Institution :
CEA-LETI, Grenoble, France
Abstract :
Massively parallel analysis systems in biology have rapidly developed over the past years. The key issue to wide diffusion of biosensors is low cost mass production. We present in this paper wafer level parallel electrochemical probe grafting and its application in DNA arrays and lab on a chip devices.
Keywords :
CMOS integrated circuits; DNA; biomedical electronics; biosensors; molecular biophysics; probes; CMOS; DNA arrays; active biochip manufacturing; biosensors; lab on a chip devices; low cost mass production; massively parallel biology analysis systems; wafer level parallel electrochemical probe grafting; wafer scale biomolecule grafting; Biosensors; Costs; DNA; Electrodes; Manufacturing; Molecular biophysics; Probes; Sensor arrays; Silicon; Throughput;
Conference_Titel :
Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-7872-5
DOI :
10.1109/IEDM.2003.1269389
