Title :
The detection of DNA using a silicon nanopore
Author :
Heng, J.B. ; Dimitrov, V. ; Grinkova, Y.V. ; Ho, C. ; Kim, T. ; Muller, Dirk ; Sligar, S. ; Sorsch, T. ; Twesten, R. ; Timp, R. ; Timp, G.
Author_Institution :
Micro & Nanotechnol. Lab., Illinois Univ., Urbana, IL, USA
Abstract :
We have developed a novel strategy for producing nanopores in inorganic, CMOS-compatible membranes using a tightly focused, high energy electron beam. We are able to characterize the nanopores physically (TEM, AFM) as well as electrically (ionic conductivity and "wetting" curves). Subsequently, we used the nanopore as a molecular Coulter counter to detect the size of a DNA molecule. This is the first report of the use of an inorganic nanopore for discriminating DNA molecules.
Keywords :
DNA; biosensors; elemental semiconductors; ionic conductivity; membranes; nanoporous materials; porous semiconductors; silicon; size measurement; AFM; DNA detection; DNA molecule size detection; Si; TEM; high energy electron beam; inorganic CMOS-compatible membranes; ionic conductivity; molecular Coulter counter; silicon nanopore; tightly focused electron beam; wetting curves; Biomembranes; Cells (biology); Conductivity; DNA; Electron beams; Lipidomics; Nanoporous materials; Proteins; Silicon; Voltage;
Conference_Titel :
Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-7872-5
DOI :
10.1109/IEDM.2003.1269393
