Title :
Fabrication Techniques for X-Band Monolithic VCOs
Author :
Brehm, G.E. ; Scott, B.N. ; Doerbeck, F.H.
Abstract :
Monolithic GaAs FET VCOs have been designed and fabricated utilizing a submicron-gate FET, wide-capacitance-ratio varactor diodes, MIM capacitors, microstripline inductors, resistors and air-bridge interconnections on a single GaAs chip. Design considerations and fabrication techniques for each of these components are given.
Keywords :
Anodes; Circuits; Diodes; FETs; Fabrication; Fingers; Gallium arsenide; Inductors; Varactors; Voltage;
Conference_Titel :
Microwave and Millimeter-Wave Monolithic Circuits
DOI :
10.1109/MCS.1982.1112182
