Title :
The gigabit chip: required manufacturing approaches
Author :
Burke, J. Richard
Author_Institution :
Semiconductor Res. Corp., Research Triangle Park, NC, USA
Abstract :
Some of the objectives of the Semiconductor Research Corporation (SRC), which is a consortium whose full members include most of the major integrated circuit and equipment producing companies in the United States, are discussed. The SRC research program is discussed. The long range objectives of producing a prototype DRAM with a density of 256 Mb and a prototype 1-Gb DRAM chip are discussed. Other goals and economics are discussed
Keywords :
DRAM chips; economics; integrated circuit manufacture; research initiatives; 1 Gbit; 256 Mbit; SRC research program; Semiconductor Research Corporation; gigabit chip; manufacturing; prototype DRAM; semiconductor memories; Circuit synthesis; Circuit testing; Integrated circuit manufacture; Integrated circuit modeling; Manufacturing processes; Materials reliability; Predictive models; Random access memory; Resists; Semiconductor device manufacture;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990
Conference_Location :
Danvers, MA
DOI :
10.1109/ASMC.1990.111223
