Title :
Implementation of a CIM system for semiconductor manufacturing at Rochester Institute of Technology
Author_Institution :
Rochester Inst. of Technol., NY, USA
Abstract :
A computer-integrated-manufacturing (CIM) system which has been installed at the Rochester Institute of Technology to support a student-run integrated-circuit factory is described. The hardware and software selected are described. The capabilities of the system are discussed. The status of the project, long-term goals, and additional educational activities are outlined
Keywords :
CAD/CAM; education; integrated circuit manufacture; manufacturing computer control; CIM system; Rochester Institute of Technology; computer-integrated-manufacturing; educational activities; hardware; semiconductor manufacturing; software; student-run integrated-circuit factory; Computational modeling; Computer aided manufacturing; Computer integrated manufacturing; Fabrication; Integrated circuit technology; Manufacturing processes; Microelectronics; Process control; Production facilities; Semiconductor device manufacture;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990
Conference_Location :
Danvers, MA
DOI :
10.1109/ASMC.1990.111231
